Characterization of pulsed laser-deposited diamond-like carbon films

Diamond-like carbon (DLC) films are excellent prospective materials for a wide range of high-technology applications, but their precise structure and properties are not well understood. The purpose of this present work was to use different analytical techniques to characterize the nature, structure and microstructure of DLC films. The pulsed laser-deposition (PLD) technique was used to deposit DLC films on Si(100) and 7059 Coming glass substrates. The deposition was carried out in a high vacuum (less than or equal to 10(-6) Torr) at different temperatures ranging from room temperature to 600 degrees C. The films were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy and Raman spectroscopic techniques. The films deposited at lower temperatures showed the characteristic features of DLC films and had better hardness and modulus properties compared with the films fabricated at higher temperatures. The results from the various techniques are combined and discussed in the context of developing additional insight into the synthesis-structure-property relationship of these films. (C) 1998 Elsevier Science S.A.