Observation of adsorption and reaction of NH3 on crystalline Al2O3 under steady-state conditions using external-reflection infrared spectroscopy

被引：12

作者：

Bermudez, VM ^{[1
]}

机构：

[1] USN, Res Lab, Washington, DC 20375 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 04期

关键词：

D O I：

10.1116/1.581384

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin crystalline films of Al2O3 have been grown by reaction of a NiAl(111) surface with chemisorbed O at elevated temperature. The resulting Al2O3/NiAl buried metal layer structure has then been used as a substrate for studies of NH3 adsorption under steady-state conditions at similar to 300 K and up to similar to 200 Torr. The technique used is polarization-modulated infrared reflection absorption spectroscopy, the application of which to in situ studies of surface chemistry is described in detail: Evidence is seen that suggests incorporation of N into the Al2O3, and adsorbed NH3 is detected under high (greater than or equal to 25 Torr) static pressures. [S0734-2101(98)07604-0].

引用

收藏

页码：2572 / 2580

页数：9

相关论文

共 90 条

[1]

[Anonymous], FOURIER TRANSFORM IN

[2] POLARIZATION MODULATION FOURIER-TRANSFORM INFRARED REFLECTANCE MEASUREMENTS OF THIN-FILMS AND MONOLAYERS AT METAL-SURFACES UTILIZING REAL-TIME SAMPLING ELECTRONICS [J].

BARNER, BJ ;

GREEN, MJ ;

SAEZ, EI ;

CORN, RM .

ANALYTICAL CHEMISTRY, 1991, 63 (01) :55-60

[3] Preparation and characterization of thin, well-ordered aluminum oxynitride films on NiAl(001) [J].

Bartolucci, F ;

Schmitz, G ;

Gassmann, P ;

Franchy, R .

JOURNAL OF APPLIED PHYSICS, 1996, 80 (11) :6467-6473

[4] NUCLEATION AND GROWTH OF AIN - SELF-LIMITING REACTIONS AND THE REGENERATION OF ACTIVE-SITES USING SEQUENTIAL EXPOSURES OF TRIMETHYLALUMINUM AND AMMONIA ON SILICA AT 600 K [J].

BARTRAM, ME ;

MICHALSKE, TA ;

ROGERS, JW ;

PAINE, RT .

CHEMISTRY OF MATERIALS, 1993, 5 (10) :1424-1430

[5] A REEXAMINATION OF THE CHEMISORPTION OF TRIMETHYLALUMINUM ON SILICA [J].

BARTRAM, ME ;

MICHALSKE, TA ;

ROGERS, JW .

JOURNAL OF PHYSICAL CHEMISTRY, 1991, 95 (11) :4453-4463

[6] CHEMISORPTION OF TRIMETHYLALUMINUM AND AMMONIA ON SILICA - MECHANISMS FOR THE FORMATION OF AL-N BONDS AND THE ELIMINATION OF METHYL-GROUPS BONDED TO ALUMINUM [J].

BARTRAM, ME ;

MICHALSKE, TA ;

ROGERS, JW ;

MAYER, TM .

CHEMISTRY OF MATERIALS, 1991, 3 (05) :953-960

[7] Polarization modulation infrared reflection absorption spectroscopy of CO adsorption on Co(0001) under a high-pressure regime [J].

Beitel, GA ;

Laskov, A ;

Oosterbeek, H ;

Kuipers, EW .

JOURNAL OF PHYSICAL CHEMISTRY, 1996, 100 (30) :12494-12502

[8] A combined in-situ PM-RAIRS and kinetic study of single-crystal cobalt catalysts under synthesis gas at pressures up to 300 mbar [J].

Beitel, GA ;

deGroot, CPM ;

Oosterbeek, H ;

Wilson, JH .

JOURNAL OF PHYSICAL CHEMISTRY B, 1997, 101 (20) :4035-4043

[9] INFRARED OPTICAL-PROPERTIES OF DIELECTRIC METAL LAYER STRUCTURES OF RELEVANCE TO REFLECTION ABSORPTION-SPECTROSCOPY [J].

BERMUDEZ, VM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (01) :152-157

[10] MECHANISTICS OF EARLY STAGE GROWTH OF ALN ON ALUMINA - TMAL AND NH3 [J].

BERTOLET, DC ;

ROGERS, JW .

CHEMISTRY OF MATERIALS, 1993, 5 (03) :391-395

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