N-point spatial phase-measurement techniques for non-destructive testing

被引:50
作者
Creath, K
Schmit, J
机构
[1] Optical Sciences Center, University of Arizona, Tucson
关键词
D O I
10.1016/0143-8166(95)00096-8
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Spatial phase-measurement interferometry techniques commonly used in non-destructive testing are affected by a number of fundamental error sources. This paper focuses on the major limitations for phase calculations using standard N-point algorithms. These limitations include: the wrong carrier frequency, unequally spaced fringes, detector nonlinearities and variations in the de fringe intensity. The character and magnitude of these errors are quantified by using computer simulations. A displacement measurement of a bent plate using different algorithms on the same data shows that practical limitations are unequally-spaced fringes and variations in dc intensity and fringe visibility. These errors limit the resolution of this type of measurement to about a tenth of a wave r.m.s.
引用
收藏
页码:365 / 379
页数:15
相关论文
共 11 条
[1]  
Carre P., 1966, METROLOGIA, V2, P13, DOI DOI 10.1088/0026-1394/2/1/005
[2]  
CREATH K, 1994, HOLOGRAPHIC INTERFER, P109
[3]   DIGITAL PHASE-SHIFTING INTERFEROMETRY - A SIMPLE ERROR-COMPENSATING PHASE CALCULATION ALGORITHM [J].
HARIHARAN, P ;
OREB, BF ;
EIJU, T .
APPLIED OPTICS, 1987, 26 (13) :2504-2506
[4]   PHASE-SHIFTING FOR NONSINUSOIDAL WAVE-FORMS WITH PHASE-SHIFT ERRORS [J].
HIBINO, K ;
OREB, BF ;
FARRANT, DI ;
LARKIN, KG .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1995, 12 (04) :761-768
[5]   DESIGN AND ASSESSMENT OF SYMMETRICAL PHASE-SHIFTING ALGORITHMS [J].
LARKIN, KG ;
OREB, BF .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1992, 9 (10) :1740-1748
[6]  
ROBINSON DW, 1993, INTERFEROGRAM ANAL, P141
[7]   EXTENDED AVERAGING TECHNIQUE FOR DERIVATION OF ERROR-COMPENSATING ALGORITHMS IN PHASE-SHIFTING INTERFEROMETRY [J].
SCHMIT, J ;
CREATH, K .
APPLIED OPTICS, 1995, 34 (19) :3610-3619
[8]  
SCHMIT J, 1992, P SOC PHOTO-OPT INS, V1755, P202
[9]  
SCHMIT J, IN PRESS OPT LASERS
[10]   DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES [J].
SCHWIDER, J ;
BUROW, R ;
ELSSNER, KE ;
GRZANNA, J ;
SPOLACZYK, R ;
MERKEL, K .
APPLIED OPTICS, 1983, 22 (21) :3421-3432