A PC-interfaced, compact laser-diode feedback interferometer for displacement measurements

被引：79

作者：

Donati, S

Falzoni, L

Merlo, S

机构：

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1996年 / 45卷 / 06期

关键词：

D O I：

10.1109/19.543990

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a laser-diode feedback interferometer for displacement measurements with directional discrimination and resolution better than 10(-6) m. This new, compact instrument consists of a small optical head and a signal processing board, which is interfaced to a personal computer. The prototype developed has a dynamic range of 2 m and an accuracy of about 5 mu m/m, using a corner cube as a remote reflector. Thanks to PC interfacing, the displacement is directly available in metric units and errors due to temperature fluctuations can be corrected with software signal processing.

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页码：942 / 947

页数：6

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