Preparation of thin films of copper(I) bromide by rf sputtering: morphology and electrical properties

被引:24
作者
Seguin, JL
Bendahan, M
Lollmun, G
Pasquinelli, M
Knauth, P
机构
[1] Fac Sci Marseille St Jerome, Lab Elect & Physicochim Couches Minces, F-13397 Marseille 20, France
[2] Fac Sci Marseille St Jerome, Lab Defauts Semicond & Leurs Oxydes, F-13397 Marseille, France
[3] Fac Sci Marseille St Jerome, UMR CNRS 6518, Lab EDIFIS Met, F-13397 Marseille 20, France
关键词
copper(I) bromide CuBr; current-voltage characteristics; rf sputtering;
D O I
10.1016/S0040-6090(97)00900-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The preparation of thin films of copper(I) bromide (CuBr) on glass, silicon and copper substrates by r.f. sputtering is described, Polycrystalline films with the gamma-CuBr structure and randomly oriented grains in the micrometer range were obtained. Exponential current-voltage characteristics were interpreted by a p-type semiconductivity of CuBr thin films and related to the copper deficiency of the material. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:31 / 36
页数:6
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