InSb thin films grown on GaAs substrate and their magneto-resistance effect

被引:24
作者
Okamoto, A [1 ]
Ashihara, A [1 ]
Akaogi, T [1 ]
Shibasaki, I [1 ]
机构
[1] Asahikasei Corp, Fuji, Shizuoka 4168501, Japan
关键词
doping; molecular beam epitaxy; antimonides;
D O I
10.1016/S0022-0248(01)00784-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
InSb thin films were grown on GaAs (1 0 0) substrates by molecular beam epitaxy (MBE). N-type impurity (Sn and Si) doping Of InSb was investigated for the purpose of reducing its temperature dependence of resistivity. It was found that stable Sn-doped InSb thin films with large electron mobility (4.5 x 10(4) cm(2)/Vs) and sheet electron concentration (7.2 x 10(12) cm(-2)) can be fabricated. Magneto-resistance (MR) devices using these films show a large enough MR effect and an extremely small temperature dependence of resistance. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:619 / 624
页数:6
相关论文
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YOSHIDA T, 1997, P INT C SOL STAT SEN, P417