Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding

Fabrication technology was developed for realization of three dimensional micro structure composed of different materials using excimer laser ablation and ultra fine particle jet molding. This method enables micro devices composed of actuator and sensor materials (PZT) and electrodes (metal). SEM observation and density and electrical property measurement showed a good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85 %, dielectric constant of deposited PZT layer of 760). Deposition rate of PZT was much faster than any other deposition techniques and up to 40 mu m of thick PZT layer was successfully formed with proper metal electrode structure.