Macroporous TiO2 thin film gas sensors obtained using colloidal templates

被引：64

作者：

Kim, Il-Doo ^{[1
]}

Rothschild, Avner ^{[2
]}

Yang, Dae-Jin ^{[3
]}

Tuller, Harry L. ^{[2
]}

机构：

[1] Korea Inst Sci & Technol, Optoelect Mat Res Ctr, Seoul 130650, South Korea

[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[3] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 130卷 / 01期

基金：

美国国家科学基金会;

关键词：

colloidal templates; TiO2; microspheres; gas sensors; thin films; macroporous;

D O I：

10.1016/j.snb.2007.07.092

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Chemical and physical synthesis routes were combined to prepare macroporous TiO2 thin films by RF sputtering onto poly methyl methacrylate (PMMA) microsphere templated substrates. The organic template was removed by thermal decomposition at 450 degrees C leaving a thin layer of TiO2 anatase hollow hemispheres with diameter commensurate with that of the original PMMA microspheres (800 nm). This unique morphology increased active surface area while reducing the deleterious interfacial effects between film and substrate leading to substantially enhanced NO2 sensitivity. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：9 / 13

页数：5

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