Ion liquid chromatography on-a-chip with beads-packed parylene column

被引:14
作者
He, Q [1 ]
Pang, CL [1 ]
Tai, YC [1 ]
Lee, TD [1 ]
机构
[1] CALTECH, Caltech Micromachining Lab, Pasadena, CA 91125 USA
来源
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年
关键词
D O I
10.1109/MEMS.2004.1290560
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A parylene-MEMS ion-exchange Liquid Chromatography (LC) chip is presented here. The chip is integrated with microfluidic I/O ports, a separation column, frits/filters, and a conductivity detector. The column is packed with conventional LC stationary phase support materials, i.e. micro-beads with surface functional groups. To withstand high pressure normally encountered in High Performance Liquid Chromatography (HPLC), a self-aligned, channel-anchoring technique is developed to increase the pressure rating of the Parylene microfluidic devices from 30 to at least 800psi. On-chip injection, separation and detection of anions in water, with similar to25ppm concentration, have been successfully demonstrated. To our knowledge, this is the first demonstration of microbeads-packed column ion liquid chromatography (LC) on a chip.
引用
收藏
页码:212 / 215
页数:4
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