A low-cost oxygen sensor fabricated as a screen-printed semiconductor device suitable for unheated operation at ambient temperatures

被引：12

作者：

Atkinson, J ^{[1
]}

Cranny, A ^{[1
]}

de Cloke, CS ^{[1
]}

机构：

[1] Univ Southampton, Dept Engn Mech, Thin Film Unit, Southampton SO17 1BJ, Hants, England

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 47卷 / 1-3期

关键词：

oxygen sensor; thick film sensors; tin oxide;

D O I：

10.1016/S0925-4005(98)00020-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A novel sensor for the determination of atmospheric oxygen levels has been fabricated as a low-cost, screen-printed, conductimetric metal oxide him device. The sensor can be operated at ambient temperatures without recourse to heating of the sensing element and can employ simple detection circuits due to the relatively high level of conductance of the metal oxide films. High sensitivities to changes in oxygen concentration with good repeatability are reported. Device cross-sensitivity to the environmental parameters of temperature and humidity have also been investigated. (C) 1998 Elsevier Science S.A. All nights reserved.

引用

页码：171 / 180

页数：10

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