Technologies for nanofluidic systems:: top-down vs. bottom-up -: a review

被引:374
作者
Mijatovic, D [1 ]
Eijkel, JCT [1 ]
van den Berg, A [1 ]
机构
[1] Univ Twente, MESA Inst Nanotechnol, BIOS Lab Chip Grp, NL-7500 AE Enschede, Netherlands
关键词
D O I
10.1039/b416951d
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
This paper gives an overview of the most commonly used techniques for nanostructuring and nanochannel fabrication employed in nanofluidics. They are divided into two large categories: top-down and bottom-up methods. Top-down methods are based on patterning on large scale while reducing the lateral dimensions to the nanoscale. Bottom-up methods arrange atoms and molecules in nanostructures. Here, we review the advantages and disadvantages of those methods and give some future perspectives. It is concluded that technology in the region of 1 - 10 nm is lacking and potentially can be covered by using the pulsed-laser deposition method as a controlled way for thin film deposition ( thickness of a few nanometers) and further structuring by the top-down method.
引用
收藏
页码:492 / 500
页数:9
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