A refractometric sensor using index-sensitive mode resonance between single-mode fiber and thin film amorphous silicon waveguide

被引：33

作者：

Andreev, A

Pantchev, B

Danesh, P

Zafirova, B

Karakoleva, E

Vlaikova, E

Alipieva, E

机构：

[1] Bulgarian Acad Sci, Inst Solid State Phys, BU-1784 Sofia, Bulgaria

[2] Bulgarian Acad Sci, Inst Elect, BU-1784 Sofia, Bulgaria

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 106卷 / 01期

关键词：

amorphous silicon; optical fiber sensor;

D O I：

10.1016/j.snb.2004.09.002

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A waveguide structure consisting of a side-polished single-mode polarization maintaining (PM) fiber and amorphous silicon film on top was applied for "in situ" control of the amorphous silicon deposition process. The changes in the fiber output intensities resulting from the film thickness growing were measured. The interaction of the fiber mode and TE0 and TE1 planar waveguide (PWG) modes was investigated. The applicability of the structure as a high sensitive refractometric sensor element was demonstrated. (c) 2004 Elsevier B.V. All rights reserved.

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页码：484 / 488

页数：5

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