Combined heat transfer in floating zone growth of large silicon crystals with radiation on diffuse and specular surfaces

被引:25
作者
Guo, ZX
Maruyama, S
Togawa, S
机构
[1] Tohoku Univ, Inst Fluid Sci, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Komatsu Elect Met Co Ltd, Hiratsuka, Kanagawa 254, Japan
关键词
heat transfer; radiation; specular reflection; floating zone growth; silicon crystal; Joulean heat;
D O I
10.1016/S0022-0248(98)00752-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Numerical analyses are conducted to investigate the combined heat transfer in floating zone growth of large Si crystals with needle-eye technique. The radiation element method, REM2, is employed to determine the radiative heat exchange, in which the view factors associated with the components in the float zone furnace and both the diffuse and specular reflection components are incorporated. The boundary element method and the finite difference method are adopted to calculate the electromagnetic field and the heat conduction, respectively. The effect of surface radiative characteristics of Si melt and crystal, i.e., diffuse and/or specular, is discussed in detail. It is found that the consideration of specular surfaces increases the Joulean heat and the radiative heat flux. The temperature fields are obtained for the cases of diffuse and specular, and the difference between the two different cases is obvious in the crystal and molten zone areas. The molten zone is enlarged when the specular surface is accounted for. The interface shape is examined and found to be in good agreement with the experiment. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:321 / 330
页数:10
相关论文
共 19 条
[1]   THEORY OF MOLTEN ZONE SHAPE AND STABILITY [J].
CORIELL, SR ;
CORDES, MR .
JOURNAL OF CRYSTAL GROWTH, 1977, 42 (DEC) :466-472
[2]   THERMAL-CAPILLARY ANALYSIS OF SMALL-SCALE FLOATING ZONES - STEADY-STATE CALCULATIONS [J].
DURANCEAU, JL ;
BROWN, RA .
JOURNAL OF CRYSTAL GROWTH, 1986, 75 (02) :367-389
[3]   Radiative heat transfer in silicon floating zone furnace with specular reflection on concave surfaces [J].
Guo, Z ;
Maruyama, S ;
Togawa, S .
JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING, 1998, 41 (04) :888-894
[4]  
GUO Z, 1998, 75 JSME SPR ANN M 5, P98
[5]  
GUO Z, 1998, 75 JSME SPR ANN M 3, P389
[6]   Radiative heat transfer in curved specular surfaces in Czochralski crystal growth furnace [J].
Guo, ZX ;
Maruyama, S ;
Tsukada, T .
NUMERICAL HEAT TRANSFER PART A-APPLICATIONS, 1997, 32 (06) :595-611
[7]   HEAT-TRANSFER, FLUID-FLOW AND INTERFACE SHAPES IN FLOATING-ZONE CRYSTAL-GROWTH [J].
LAN, CW ;
KOU, S .
JOURNAL OF CRYSTAL GROWTH, 1991, 108 (1-2) :351-366
[8]   EFFECTS OF ROTATION ON HEAT-TRANSFER, FLUID-FLOW AND INTERFACES IN NORMAL GRAVITY FLOATING-ZONE CRYSTAL-GROWTH [J].
LAN, CW ;
KOU, S .
JOURNAL OF CRYSTAL GROWTH, 1991, 114 (04) :517-535
[9]   SHORTENED FLOATING ZONE CRYSTAL-GROWTH UNDER NORMAL GRAVITY [J].
LAN, CW ;
KOU, S .
JOURNAL OF CRYSTAL GROWTH, 1992, 119 (3-4) :281-291
[10]   Modulating dopant segregation in floating-zone silicon growth in magnetic fields using rotation [J].
Lan, CW ;
Liang, MC .
JOURNAL OF CRYSTAL GROWTH, 1997, 180 (3-4) :381-387