未找到相关数据
Surface haze in the Stokes-Mueller representation
被引：2
作者：
Church, EL
Stover, JC
机构：
来源：
FLATNESS, ROUGHNESS, AND DISCRETE DEFECT CHARACTERIZATION FOR COMPUTER DISKS, WAFERS, AND FLAT PANEL DISPLAYS
|
1996年
/
2862卷
关键词：
haze;
surface scattering;
surface roughness;
polarimetry;
Stokes vectors;
Mueller matrices;
Rayleigh-Rice model;
facet;
D O I：
10.1117/12.256191
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
This paper derives the Mueller scattering matrices for two topographic scattering models - the Rayleigh-Rice or perturbation model and the geometrical-optics or facet model. The results are used to predict the polarimetric properties of the ''haze'' on silicon-wafer surfaces.
引用
收藏
页码：54 / 68
页数：15
相关论文