Pentacene transistor encapsulated by poly-para-xylylene behaving as gate dielectric insulator and passivation film -: art. no. 183502

被引:34
作者
Tsukagoshi, K
Yagi, I
Shigeto, K
Yanagisawa, K
Tanabe, J
Aoyagi, Y
机构
[1] RIKEN, Wako, Saitama 3510198, Japan
[2] JST, PRESTO, Kawaguchi, Saitama 3320012, Japan
[3] Tokyo Inst Technol, Dept Informat Proc, Midori Ku, Kanagawa 2268502, Japan
关键词
D O I
10.1063/1.2120894
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present pentacene thin-film transistors with poly-para-xylylene gate dielectric and passivation films for plastic electronics. Both the poly-para-xylylene films are formed by dry chemical vapor deposition at room temperature. An organic pentacene channel is fully encapsulated by poly-para-xylylene films, except in the area of electrode connection. Passivation induces little degradation of the organic transistor properties. In addition, a small amount of charge transfer molecules are introduced between the pentacene channel and the metal electrodes to improve device performance. Contact resistance is sufficiently reduced by the employment of the charge transfer molecules, which is analyzed using a transmission-line model. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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