Microfabrication of new sensors for scanning probe microscopy

被引：5

作者：

Noell, W ^{[1
]}

Abraham, M ^{[1
]}

Ehrfeld, W ^{[1
]}

Lacher, M ^{[1
]}

Mayr, K ^{[1
]}

机构：

[1] Inst Microtechnol, D-55129 Mainz, Germany

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1998年 / 8卷 / 02期

关键词：

D O I：

10.1088/0960-1317/8/2/017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near-field optical microscopy. The sensor consists of a microfabricated cantilever with an integrated waveguide and a transparent near-field aperture tip. The fabrication process involves a novel method for the micromachining of optical near-field tips with an aperture diameter of 100 to 200 nm. A simple concept is introduced for the effective light coupling from the cantilever into the tip.

引用

页码：111 / 113

页数：3

共 3 条

[1] Micromachined aperture probe tip for multifunctional scanning probe microscopy [J].