Thinfilm technologies to fabricate a linear microactuator

被引：10

作者：

Föhse, M ^{[1
]}

Kohlmeier, T ^{[1
]}

Gatzen, HH ^{[1
]}

机构：

[1] Univ Hannover, Inst Microtechnol, D-30167 Hannover, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 1-2期

关键词：

MEMS; linear motor; electroplating; embedding; planarization;

D O I：

10.1016/S0924-4247(01)00509-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design selected for the microactuator is a three phase variable reluctance (VR) stepping motor with teeth. The stator consists of a flux guide, three groups of poles with teeth, and meander type coils for exciting each group of poles. The system's traveler is built up by a flux guide and teeth. For a good actuator's performance the electroplated magnetic structures' properties have to be optimized. To reach a small air gap that all VR-motors require, the microactuator's surface needs a very low roughness. Therefore, to fabricate the microactuator in thinfilm technology the most important steps are electroplating the structures and embedding these structures for final planarization. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：145 / 149

页数：5