Direct writing of patterned ceramics using electron-beam lithography and metallopolymer resists

被引：73

作者：

Clendenning, SB

Aouba, S

Rayat, MS

Grozea, D

Sorge, JB

Brodersen, PM

Sodhi, RNS

Lu, ZH

Yip, CM

Freeman, MR

Ruda, HE ^{[1
]}

Manners, I

机构：

[1] Univ Toronto, Ctr Adv Nanotechnol, Toronto, ON M5S 3E4, Canada

[2] Univ Toronto, Dept Chem, Toronto, ON M5S 3H6, Canada

[3] Univ Toronto, Dept Mat Sci & Engn, Toronto, ON M5S 3E4, Canada

[4] Univ Toronto, Inst Biomat & Biomed Engn, Dept Chem Engn & Appl Chem, Toronto, ON M5S 3G9, Canada

[5] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada

[6] Univ Toronto, Dept Chem Engn & Appl Chem, Surface Interface Ontario, Toronto, ON M5S 3E5, Canada

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 03期

关键词：

D O I：

10.1002/adma.200305740

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Patterned arrays of ceramics have been fabricated using electron-beam lithography (EBL) and a metallopolymer resist. Highly ordered arrays of dots, bars (see scanning electron microscopy and time-of-flight secondary ion mass spectrometry images in the Figure), and curved lines rich in Fe and Co are direct-written on films of a highly metallized cobalt-clusterized polyferrocenylsilane. Subsequent pyrolysis leads to ferromagnetic ceramics.

引用

页码：215 / +

页数：6

共 33 条

[21] Materials science - Putting metals into polymers [J].