Collisional-radiative model for the sputtered copper atoms and ions in a direct current argon glow discharge

被引:104
作者
Bogaerts, A
Gijbels, R
Carman, RJ
机构
[1] Univ Instelling Antwerp, Dept Chem, B-2610 Wilrijk, Belgium
[2] Macquarie Univ, Ctr Lasers & Applicat, Sydney, NSW 2109, Australia
基金
澳大利亚研究理事会;
关键词
D O I
10.1016/S0584-8547(98)00201-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
A collisional-radiative model is developed for various levels of the sputtered copper (Cu) atoms and their ions in an argon (Ar) direct current glow discharge, used as an analytical source for optical emission spectrometry. In this application, attention is paid to the photons emitted by sputtered atoms and ions, and hence to the behavior of excited levels of these species. 8 Cu atomic and 7 Cu+ ionic levels are considered in the model, as well as the Cu2+ ions. Typical results of the model are the level populations (in two dimensions) of the various levels, and the relative contributions of the different populating and depopulating processes. This model is not only of interest for analytical glow discharge optical emission spectrometry, but also for plasma diagnostic tools and for copper-vapor lasers. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1679 / 1703
页数:25
相关论文
共 76 条
[1]  
ALEKSANDROV MS, 1991, OPT SPECTROSC, V69, P311
[2]   EXCITATION OF ZN+-STAR-LEVELS IN PENNING AND CHARGE-TRANSFER REACTIONS OF HE-STAR-(23S1) AND HE+ WITH ZINC [J].
BALTAYAN, P ;
PEBAYPEYROULA, JC ;
SADEGHI, N .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1986, 19 (17) :2695-2702
[3]  
BALTAYAN P, 1985, J PHYS B ATOM MOL PH, V18, P3618
[4]   CHARGE-EXCHANGE WITH ION EXCITATION IN COLLISIONS OF HELIUM-IONS WITH MERCURY ATOMS [J].
BELYAEV, AK .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1993, 26 (21) :3877-3890
[5]   PENNING IONIZATION SPECTROSCOPY USING THE OPTOGALVANIC EFFECT [J].
BENAMAR, A ;
SHUKER, R ;
EREZ, G ;
MIRON, E .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :763-765
[6]   CRITICAL SURVEY OF ATOMIC TRANSITION-PROBABILITIES FOR CUI [J].
BIELSKI, A .
JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1975, 15 (06) :463-472
[7]  
Bochkova O. P., 1991, Optics and Spectroscopy, V70, P9
[8]   MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196
[9]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[10]   THE ROLE OF FAST ARGON IONS AND ATOMS IN THE IONIZATION OF ARGON IN A DIRECT-CURRENT GLOW-DISCHARGE - A MATHEMATICAL SIMULATION [J].
BOGAERTS, A ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6427-6431