Calibration and uncertainties in gas microflow measurement in the range of 2-200 μg s-1 of nitrogen

被引：5

作者：

Barbe, J. ^{[1
]}

Dijoux, F. ^{[1
]}

Yardin, C. ^{[1
]}

Mace, T. ^{[1
]}

Vaslin-Reimann, S. ^{[1
]}

机构：

[1] LNE, F-75724 Paris 15, France

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2010年 / 21卷 / 07期

关键词：

microflow metrology; gas chromatography; molbloc;

D O I：

10.1088/0957-0233/21/7/074002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Today the field of chemistry needs calibration in gas microflow measurement for applications such as thin film deposition, catalysis or the automotive industry. Few European metrology laboratories conduct this type of calibration. In France no laboratory can calibrate below 20 mu g s(-1). To meet this growing need, LNE has developed a calibration bench using the method of 'traced gas' in the range of 2-200 mu g s(-1). The method and the uncertainty estimation of the calibration bench and calibration results of three laminar flowmeters of Molbloc type and industrial flowmeters are presented in this paper.

引用

页数：5