Nanoscale chemical and structural study of Co-based FEBID structures by STEM-EELS and HRTEM

被引：43

作者：

Cordoba, Rosa ^{[1
,2
]}

Fernandez-Pacheco, Rodrigo ^{[1
,3
]}

Fernandez-Pacheco, Amalio ^{[1
,2
]}

Gloter, Alexandre ^{[3
]}

Magen, Cesar ^{[1
,2
,4
]}

Stephan, Odile ^{[3
]}

Ricardo Ibarra, Manuel ^{[1
,2
,5
]}

Maria De Teresa, Jose ^{[1
,2
,5
]}

机构：

[1] Univ Zaragoza, Inst Nanociencia Aragon INA, Lab Microscopias Avanzadas LMA, Zaragoza 50018, Spain

[2] Univ Zaragoza, Fac Ciencias, Dept Fis Mat Condensada, E-50009 Zaragoza, Spain

[3] Univ Paris 11, STEM Grp, Phys Solides Lab, CNRS,UMR 8502, F-91405 Orsay, France

[4] Fdn ARAID, Zaragoza 50004, Spain

[5] Univ Zaragoza, Fac Ciencias, CSIC, Inst Ciencia Mat Aragon, E-50009 Zaragoza, Spain

来源：

NANOSCALE RESEARCH LETTERS | 2011年 / 6卷

基金：

奥地利科学基金会;

关键词：

Co deposits; FEBID; EELS; HRTEM; FOCUSED ELECTRON-BEAM; IMAGE;

D O I：

10.1186/1556-276X-6-592

中图分类号：

TB3 [工程材料学];

学科分类号：

082905 [生物质能源与材料];

摘要：

Nanolithography techniques in a scanning electron microscope/focused ion beam are very attractive tools for a number of synthetic processes, including the fabrication of ferromagnetic nano-objects, with potential applications in magnetic storage or magnetic sensing. One of the most versatile techniques is the focused electron beam induced deposition, an efficient method for the production of magnetic structures highly resolved at the nanometric scale. In this work, this method has been applied to the controlled growth of magnetic nanostructures using Co-2(CO)(8). The chemical and structural properties of these deposits have been studied by electron energy loss spectroscopy and high-resolution transmission electron microscopy at the nanometric scale. The obtained results allow us to correlate the chemical and structural properties with the functionality of these magnetic nanostructures.

引用

页码：1 / 6

页数：6

共 20 条

[1]

Rapid electron beam assisted patterning of pure cobalt at elevated temperatures via seeded growth [J].