SF6O2, air cold plasma are used for surface modification of the biaxially oriented polypropylene(BOPP) films. The effect of surface grafting on electret property is investigated. Surface potential is characterized as a parameter to evalue charge storage capacity, and half value temperature(T-1/2) of thermal stimulated charge decay(TSCD) is an indicator of charge storage stability. The experiment result show that surface grafting increase the charge storage capacity 50% and T-1/2 raise 25 degrees C. IR spectrum gives some detail information about the chemical structure change taking place during treatment, especially introduction of polar groups C=O,C-F etc. Finally the relationship between chemical component and trap density and modification effect are discussed.