Description of an x-ray microscope with 30 nm resolution

被引：29

作者：

Medenwaldt, R ^{[1
]}

Uggerhoj, E ^{[1
]}

机构：

[1] Univ Aarhus, Inst Storage Ring Facil, DK-8000 Aarhus C, Denmark

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 08期

关键词：

D O I：

10.1063/1.1149042

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The Aarhus x-ray microscope has been in operation for some years and has evolved into a scientific user facility, the activities of which include a wide range of applications. A technical description of the microscope is given with emphasis on problems that have general character for high precision instrumentation and soft x-ray equipment. (C) 1993 American Institute of Physics.

引用

页码：2974 / 2977

页数：4

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