Thermal Effects to Enhance the Responsivity of Pyroelectric Infrared Detectors

被引:12
作者
Norkus, V. [1 ]
Schulze, A. [1 ]
Querner, Y. [1 ]
Gerlach, G. [1 ]
机构
[1] Tech Univ Dresden, Solid State Elect Lab, D-01062 Dresden, Germany
来源
EUROSENSORS XXIV CONFERENCE | 2010年 / 5卷
关键词
Pyroelectric infrared detector; enhanced responsivity; thermal effects;
D O I
10.1016/j.proeng.2010.09.264
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper describes a new method to increase the responsivity of pyroelectric IR sensors in voltage mode. This method utilises lateral heat flux effects in the radiation-sensitive element to increase the output signal of the sensors for equal radiation fluxes. For this purpose, a three-dimensional pattern in the mu m range is etched into the responsive element. This paper gives an overview of the principal layout, functioning and measured properties of single-element detectors based on lithium tantalate. In accordance with mathematical and physical modelling, measurements of structured detectors revealed an increase in the voltage responsivity that depends on the chopping frequency. Experimental proof has been obtained that the amount of responsivity increase and its frequency dependence strongly depend on the structure dimensions in the responsive element. With the recently implemented structures, responsivity increases by a factor of 1.5 were obtained at a chopping frequency of 10 Hz. (C) 2010 Published by Elsevier Ltd.
引用
收藏
页码:944 / 947
页数:4
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