III-nitride blue and ultraviolet photonic crystal light emitting diodes

被引：316

作者：

Oder, TN ^{[1
]}

Kim, KH ^{[1
]}

Lin, JY ^{[1
]}

Jiang, HX ^{[1
]}

机构：

[1] Kansas State Univ, Dept Phys, Manhattan, KS 66506 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 04期

关键词：

D O I：

10.1063/1.1644050

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present results on enhancement of 460 nm blue and 340 nm UV optical power output in III-nitride light emitting diodes (LEDs) using photonic crystals (PCs) under current injection. Triangular arrays of the PCs with diameter/periodicity of 300/700 nm were patterned using electron-beam lithography and inductively coupled plasma dry etching. The total power at 20 mA of 300x300 mum(2) unpackaged LED chips revealed an increase by 63% and 95% for the blue and UV LEDs, respectively, as a result of the PC formation. Possible ways for further improving enhancement of light extraction using PCs are discussed. (C) 2004 American Institute of Physics.

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页码：466 / 468

页数：3

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