[1] Shanghai Jiao Tong Univ, Dept Bionanosci & Engn, Natl Key Lab Nano Micro Fabricat Technol,Inst Mic, Key Lab Thin Film & Micro Fabricat,Minist Educ, Shanghai 200030, Peoples R China
[2] Univ Calif Riverside, Dept Mech Engn, Riverside, CA 92521 USA
[3] Univ Calif Riverside, Dept Elect Engn, Riverside, CA 92521 USA