SU-8 flow field plates for a micro PEMFC

A SU-8 photoresist microfabrication process was developed for micro proton exchange membrane fuel cell flow structures for both anode and cathode flow field plates with a cross section of 5 cm 2 (22.5 mm x 22.5 mm) and thickness (for a single cell) of about 750 mum. The new design for. flow. field plates would have SU-8 used as not only a photoresist but also as a microstructure material. A thickness of 30 nm Pt sputter loading deposited onto a Nafion 117 for membrane electrode assembly was made, with both scanning electron microscopy and atomic force microscopy characterization. Air. flows were completed in hydrogen fuel cells with air breathing and forced air. flows of low input pressure as well as low velocity. Performance tests of polarization curves and power density distribution as well as impendence measurements were conducted and discussed to examine the effects of orientation of the cathode surface with. five hydrogen feeding rates as well as different air flow feeding modes.