Micromachined 1x2 optical-fiber switch

被引：48

作者：

Field, LA

Burriesci, DL

Robrish, PR

Ruby, RC

机构：

[1] Hewlett-Packard Laboratories, Palo Alto, CA 94304

[2] Hewlett-Packard Laboratories, Palo Alto, CA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 53卷 / 1-3期

关键词：

micromechanics; switching; thermal actuators; optical fibers;

D O I：

10.1016/0924-4247(96)80154-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a 1X2 thermally actuated optical-fiber switch. The switch includes a thick electroplated nickel actuator to move a single-mode optical fiber, and a trench anisotropically etched in silicon for alignment of 'send' and 'receive' optical fibers. The switch is designed such that the optical fibers do not need to be coupled by means of waveguides or lenses in order to achieve the desired low-loss switching function. The switch actuators are made from 25-50 mu m thick electroplated nickel. The switches use edges of trenches anisotropically etched in silicon for fiber alignment. Test actuators have been built at the same time as the switches, integrated with short, stiff cantilevers to be used as force gauges, as well as etched deflection scales.

引用

页码：311 / 315

页数：5