Optical shortpass filters based on macroporous silicon

被引:77
作者
Lehmann, V [1 ]
Stengl, R
Reisinger, H
Detemple, R
Theiss, W
机构
[1] Infineon Technol, Corp Res, Munich, Germany
[2] Aachen Univ Technol, Inst Phys 1, Aachen, Germany
[3] M Theiss Hard & Software, Aachen, Germany
关键词
D O I
10.1063/1.1334943
中图分类号
O59 [应用物理学];
学科分类号
摘要
A promising class of optical filters is introduced, based on diffraction at small apertures. The filters consist of straight pores with diameters in the micrometer regime and a length of up to one millimeter through a silicon wafer. In contrast to Bragg, Woods, or glass filters, the light is not transmitted in matter but in the medium inside the pores. The filters therefore show a true shortpass characteristic. Due to constructive interference between the high number of pores in an array, macropore filters are of high optical quality and may replace conventional filters in imaging systems. (C) 2001 American Institute of Physics.
引用
收藏
页码:589 / 591
页数:3
相关论文
共 5 条
[1]  
Born M., 1975, PRINCIPLES OPTICS
[2]  
Gruning U, 1996, APPL PHYS LETT, V68, P747, DOI 10.1063/1.116729
[3]   The temperature dependence of the absorption coefficient of porous silicon [J].
Kovalev, D ;
Polisski, G ;
BenChorin, M ;
Diener, J ;
Koch, F .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (10) :5978-5983
[4]   THE PHYSICS OF MACROPORE FORMATION IN LOW DOPED N-TYPE SILICON [J].
LEHMANN, V .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (10) :2836-2843
[5]  
PALID ED, 1985, HDB OPTICAL CONSTANT