A micromechanical switch as the logic elements for circuits in multi chip module on Si (MCM-Si)

被引：7

作者：

Hirata, A ^{[1
]}

Machida, K ^{[1
]}

Kyuragi, H ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] NTT Corp, Syst Elect Labs, Atsugi, Kanagawa 2430198, Japan

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746893

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

An electrostatic micromechanical switch for logic elements that can conduct a single logic operation with only one switch is proposed. The actuation voltage of this switch is reduced to 15 V even though its area is 60 x 70 mu m(2), and this is achieved by placing narrow beams symmetrically on a multi chip module on Si (MCM-Si). The on resistance of this switch is 5 Omega, its off resistance is over 10(10) Omega, and its maximum switching frequency is 10 kHz This switch has two driving inputs, and its switching can be controlled by the number of driving inputs that are "High". By adjusting the beam elastic force, we made two types of switches which operate "AND" or "OR" logic at the same driving voltage. Compact logic circuits for a MCM-Si can be obtained by using these switches.

引用

页码：582 / 587

页数：6