Femtosecond laser-induced nanofabrication in the near-field of atomic force microscope tip

被引:24
作者
Kirsanov, A
Kiselev, A
Stepanov, A
Polushkin, N
机构
[1] Russian Acad Sci, Inst Appl Phys, Nizhnii Novgorod 603950, Russia
[2] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 603600, Russia
关键词
D O I
10.1063/1.1621722
中图分类号
O59 [应用物理学];
学科分类号
摘要
The formation of nanocraters on the surface of metallic films under the tip of an atomic force microscope by femtosecond laser pulses is demonstrated. The influence of laser polarization, pulse duration, and tip-sample distance on threshold fluence for nanoprocessing is investigated. Analysis of experiments shows that heating of the tip by laser radiation and its lengthening is the predominant mechanism for laser-induced nanoprocessing. (C) 2003 American Institute of Physics.
引用
收藏
页码:6822 / 6826
页数:5
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