Silicon-based transmissive diffractive optical element

被引：13

作者：

Lee, CC ^{[1
]}

Chang, YC

Wang, CM

Chang, JY

Chi, GC

机构：

[1] Natl Cent Univ, Ctr Opt Sci, Jungli 320, Taiwan

[2] Natl Cent Univ, Inst Opt Sci, Jungli 320, Taiwan

[3] Natl Cent Univ, Dept Phys, Jungli 320, Taiwan

来源：

OPTICS LETTERS | 2003年 / 28卷 / 14期

关键词：

D O I：

10.1364/OL.28.001260

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A silicon nitride (SiNx) membrane diffractive optical element (DOE) designed to exhibit beam-splitting and focusing behavior at visible wavelengths has been fabricated and tested. Since the fabrication process is based on silicon micromachining technology, the DOE is easily integrated with a laser diode chip and a photodiode chip on a silicon substrate to function as the hologram-laser-photodiode unit for use in the pickup head of a CD or DVD system. The SiNx film is deposited with low-pressure chemical-vapor deposition and the free-standing membrane is formed by KOH etching. The transmissive DOE showed a high diffraction efficiency (>20% for a binary-phase-level element). The experimental evaluation was in good agreement with the designed and modeled predictions. (C) 2003 Optical Society of America.

引用

页码：1260 / 1262

页数：3

共 8 条

[1] OPTOELECTRONIC COMPONENT ARRAYS FOR OPTICAL INTERCONNECTION OF CIRCUITS AND SUBSYSTEMS [J].