共 16 条
[1]
HOMOEPITAXY AND CONTROLLED OXIDATION OF SILICON AT LOW-TEMPERATURES USING LOW-ENERGY ION-BEAMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1995, 13 (04)
:1639-1644
[2]
BRYCE DK, 1989, NUCL INSTRUM METH B, V44, P68
[3]
EHRLICH G, 1988, CHEM PHYSICS SOLID S, V7
[4]
FAN ZY, 1998, IN PRESS J VAC SCI A, V16
[7]
The Townsend ionization coefficient alpha and some elementary processes in neon with small admixtures of argon
[J].
PHYSICA,
1937, 4
:0450-0463
[8]
LIEBERMAN MA, 1994, PRINCIPLES PLASMA DI, P432