Stacked ARROW vertical coupler with large tolerance and short coupling length for three-dimensional interconnects

被引:2
作者
Ikuta, S
Kubota, S
Pan, W
Chu, ST
Kokubun, Y
机构
[1] Yokohama Natl Univ, Fac Engn, Div Elect & Comp Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
[2] Kanagawa Acad Sci & Technol, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
关键词
D O I
10.1049/el:19981305
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A compact ARROW-type vertical coupler for three dimensional optical interconnects has been designed which has large fabrication tolerances and a short coupling length. A very short coupling length of 350 mu m and large coupling efficiency of 86% have been experimentally demonstrated.
引用
收藏
页码:1851 / 1852
页数:2
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