A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

被引：8

作者：

Hah, D ^{[1
]}

Choi, CA ^{[1
]}

Jun, CH ^{[1
]}

Kim, YT ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Basic Res Lab, Taejon 305350, South Korea

来源：

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年

关键词：

D O I：

10.1109/OMEMS.2003.1233511

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of +/-1.4degrees at 66 V-DC was achieved for a 1-mm-diameter micromirror.

引用

页码：151 / 152

页数：2

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