Phase separation in magnetron sputtered superhard BCN thin films

The similar crystalline structure of diamond and cubic boron nitride suggests the synthesis of superhard thin films containing boron, carbon and nitrogen. BCN thin films have been prepared by reactive r.f.-magnetron sputtering of a hexagonal boron nitride target in an argon/acetylene atmosphere of a constant pressure of 2 x 10(-2) mbar. A deposition temperature of 600 degrees C leads to nearly hydrogen-free BCN films. At a flow ratio of 0.05% C2H2/Ar, the composition of the deposited BCN films is close to B5CN3 as a result of energy dispersive X-ray (EDX) and elastic recoil detection (ERD) measurements. By applying a r.f.-substrate bias, the ion energy has been varied at a constant ratio of ions to film-forming particles of 4. The BCN films show a maximum in stress at an ion energy of 110 eV due to knock-on subplantation of argon ions and a phase separation into carbon, boron and cubic boron nitride regions as a result of X-ray diffraction investigations, Auger electron-and infra-red spectroscopy. (C) 1998 Elsevier Science S.A.