Electrophoretic deposition and sintering of thin/thick PZT films

被引：77

作者：

Van Tassel, J ^{[1
]}

Randall, CA ^{[1
]}

机构：

[1] Penn State Univ, Mat Res Lab, Particulate Mat Ctr, University Pk, PA 16801 USA

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

films; firing; ferroelectric properties; PZT;

D O I：

10.1016/S0955-2219(98)00352-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Electrophoretic deposition (EPD) is a simple, rapid, and low cost method for for ming dense lead zirconate titanate (PZT) films down to 5 mu m from particulate precursors. The three main steps of this process are. (1) formation of a charged suspension of the starting PZT powder; (2) deposition of the powder particles on an electrode under the influence of a dc electric field; and (3) fluxing and constrained sintering of the resulting particulate deposit at 900 degrees C to form a dense continuous film. A 10 mu m film formed using this process exhibited a polarization hysteresis equivalent to that of a bulk sample formed from the same starting powder, with a remnant polarization of 33 mu C cm(-2). (C) 1999 Elsevier Science Limited. All rights reserved.

引用

页码：955 / 958

页数：4