Overview of MEMS/NEMS technology development for space applications at NASA/JPL

被引:16
作者
George, T [1 ]
机构
[1] CALTECH, Jet Prop Lab, MEMS Technol Grp, Situ Technol & Expt Syst Sect, Pasadena, CA 91109 USA
来源
SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷
关键词
MEMS; NEMS; space; sensor; NASA; JPL; inertial guidance; micro-propulsion; micro-electroplating; micro-instruments; TRL; PICOSAT;
D O I
10.1117/12.497796
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
This paper highlights the current technology development activities of the MEMS Technology Group at JPL. A diverse range of MEMS/NEMS, technologies are under development, that are primarily applicable to NASA's needs in the area of robotic planetary exploration. MEMS/NEMS technologies have obvious advantages for space applications, since they offer the promise of highly capable devices with ultra low mass, size and power consumption. However, the key challenge appears to be in finding efficient means to transition these technologies into "customer" applications. A brief description of this problem is presented along with the Group's innovative approach to rapidly advance the maturity of technologies via insertion into space missions. Also described are some of the major capabilities of the MEMS Technology Group. A few important examples from among the broad classes of technologies being developed are discussed, these include the "Spider Web Bolometer", High-Performance Miniature Gyroscopes, an Electron Luminescence X-ray Spectrometer, a MEMS-based "Knudsen" Thermal Transpiration pump, MEMS Inchworm Actuators, and Nanowire-based Biological/Chemical Sensors.
引用
收藏
页码:136 / 148
页数:13
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