Fabrication of thin-film waveguide QPM-SHG devices by domain-inverted liquid-phase epitaxy

The ferroelectric domain-inversion phenomenon observed in a liquid-phase epitaxially grown LiNbO3 was applied as a new fabrication technique of a quasi-phase-matched second-harmonic generation device. A periodic domain-inverted LiNbO3 thin-film optical waveguide was fabricated by forming a periodic groove structure on a Mg-doped LiNbO3 substrate using proton-exchange and selective etching techniques followed by domain-inverted liquid-phase epitaxy. Generation of blue light with a 440 nm wavelength was demonstrated by first-order quasi-phase matching. (C) 1995 Elsevier Science B.V. All rights reserved.