Interference coating by hydrophobic aerogel-likeSiO2 thin films

被引:41
作者
Zhang, QY [1 ]
Wang, J
Wu, G
Shen, J
Buddhudu, S
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Microelect Div, Singapore 639798, Singapore
[2] Tongji Univ, Pohl Inst Solid State Phys, Shanghai 200092, Peoples R China
关键词
aerogel; sol-gel; anti-reflective coating; near-infrared reflective coating; optical properties;
D O I
10.1016/S0254-0584(01)00322-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The present paper presents a novel method of preparation of hydrophobic aerogel-like SiO2 thin films by means of a two-step acid/base derived silica sol at an ambient pressure without any supercritical drying. Crack free aero.-el-like SiO2 thin films having thickness of 100-400 nm, and refractive indices of 1.13-1.25 have been obtained upon heating at different temperatures. By using the silica aerogel-like thin films as low-refractive index component and sol-gel derived TiO2 as high-refractive index component, a two-layer refractive index gradient SiO2 hydrophobic anti-reflective (AR) coating and a 12-layer SiO2-TiO2 near infrared reflective (NIR) coatings have been successfully deposited on glass substrates. The obtained AR coatings have shown average reflectance of less than or equal to2% in the wavelength range 1000-2000 mn. A minimum transmittance of less than or equal to2% in the wavelength range between 995 and 1085 nm, and the maximum transmittance of greater than or equal to 80% in the visible range has been obtained from the deposited 12-layer SiO2-TiO2 NIR multilayer reflective coatings. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:56 / 59
页数:4
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