Simplified mass-production process for 16% efficiency multi-crystalline Si solar cells

被引：9

作者：

Arimoto, S ^{[1
]}

Nakatani, M ^{[1
]}

Nishimoto, Y ^{[1
]}

Morikawa, H ^{[1
]}

Hayashi, M ^{[1
]}

Namizaki, H ^{[1
]}

Namba, K ^{[1
]}

机构：

[1] Mitsubishi Electr Corp, Nakatsugawa Works, Photovolta Devices Technol Ctr, Itami, Hyogo 664, Japan

来源：

CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000 | 2000年

关键词：

D O I：

10.1109/PVSC.2000.915786

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

We have developed a simplified mass-production process for 16% efficiency multi-crystalline silicon solar cells. In this paper, newly developed fabrication process without increasing process steps and applying expensive equipments is described. Main improved points are as follows. 1) novel texturing method using Na2CO3 : reduced fabrication cost compared to conventional NaOH+IPA etching, 2) optimization of PECVD temperature for SiN ARC, 3) improved silver paste for fire-through of PECVD-SiN AR film: reduction of penetration into diffused n-layer during firing and finer line electrodes with high aspect ratio. By combining such novel technologies, 16% efficiency for 15cmX15cm cells has been obtained for four different suppliers' mc-Si wafers.

引用

页码：188 / 193

页数：6

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