Highly transparent nano-crystalline diamond film's grown by microwave CVD

被引：11

作者：

Bhusari, DM ^{[1
]}

Yang, JR

Wang, TY

Lin, ST

Chen, KH

Chen, LC

机构：

[1] Acad Sinica, Inst Atom & Mol Sci, Taipei, Taiwan

[2] Natl Taiwan Inst Technol, Dept Mech Engn, Taipei 10772, Taiwan

[3] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10764, Taiwan

来源：

SOLID STATE COMMUNICATIONS | 1998年 / 107卷 / 06期

关键词：

thin films; chemical vapor deposition; optical properties;

D O I：

10.1016/S0038-1098(98)00226-9

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report here the growth of highly transparent nano-crystalline diamond films on quartz substrates by microwave plasma enhanced CVD. Optical transmittance of greater than 73% beyond 700 nm has been obtained for films as thick as 1 mu m, while for 0.6 mu m thick films it is 80%. Such high optical transparency of these films is primarily attributed to the smoothness of their surface (average roughness of about 100-130 Angstrom) as well as the high content of sp(3) bonded carbon. A growth model for explaining the dependence of optical transparency on various deposition parameters is also proposed. (C) 1998 Elsevier Science Ltd. All rights reserved.

引用

页码：301 / 305

页数：5

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