Effects of interfacial layers on thermal chemical vapour deposition of carbon nanotubes using iron catalyst

被引:14
作者
Liu, C [1 ]
Cheng, AJ [1 ]
Clark, M [1 ]
Tzeng, Y [1 ]
机构
[1] Auburn Univ, Alabama Microelect Sci & Technol Ctr, Dept Elect & Comp Engn, Auburn, AL 36849 USA
关键词
carbon nanotube; thermal CVD; vertically aligned; interfacial layer;
D O I
10.1016/j.diamond.2004.10.017
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Growing vertically aligned carbon nanotubes on a smooth substrate surface requires the formation of high-density catalyst nanoparticles. This, in turn, requires the minimum diffusion of catalyst into the substrate at the growth temperature for carbon nanotubes. In this work, interfacial layers have been optimized and examined for growing vertically aligned carbon nanotubes on various smooth and nonporous substrates. With an optimized interfacial multilayer, carbon nanotubes with excellent adhesion to the substrate have also been achieved. This process can be applied to grow carbon nanotubes on almost any substrate that is compatible with the thermal CVD environments. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:835 / 840
页数:6
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