Collisional-radiative model for an argon glow discharge

被引:228
作者
Bogaerts, A
Gijbels, R
Vlcek, J
机构
[1] Univ Instelling Antwerp, Dept Chem, B-2610 Antwerp, Belgium
[2] Univ W Bohemia, Dept Phys, Plzen 30614, Czech Republic
关键词
D O I
10.1063/1.368009
中图分类号
O59 [应用物理学];
学科分类号
摘要
An extensive collisional-radiative model for the argon atoms in a glow discharge has been developed. Sixty-five effective argon atomic levels are considered. The processes taken into account are radiative decay, electron, fast argon ion and argon atom and thermal argon atom impact ionization, excitation and deexcitation between all the levels, electron-ion radiative recombination, and electron-ion three-body recombination where the third body is an electron, fast argon ion or atom, or a thermal argon atom. Some additional processes are incorporated for the two 4s metastable levels, i.e., Penning ionization of sputtered atoms, two- and three-body collisions with argon ground state atoms, collisions between two atoms; in a metastable level, and diffusion and subsequent deexcitation at the walls. Typical results of the model are the populations of the various excited levels as a function of distance, and the relative contributions of different populating and depopulating processes for all levels. (C) 1998 American Institute of Physics.
引用
收藏
页码:121 / 136
页数:16
相关论文
共 61 条
[1]   A COLLISIONAL-RADIATIVE MODEL FOR MICROWAVE DISCHARGES IN HELIUM AT LOW AND INTERMEDIATE PRESSURES [J].
ALVES, LL ;
GOUSSET, G ;
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (12) :1713-1732
[2]   RECOMBINATION BETWEEN ELECTRONS AND ATOMIC IONS .2. OPTICALLY THICK PLASMAS [J].
BATES, DR ;
KINGSTON, AE ;
MCWHIRTER, WP .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1962, 270 (1341) :155-&
[3]   RECOMBINATION BETWEEN ELECTRONS AND ATOMIC IONS .1. OPTICALLY THIN PLASMAS [J].
BATES, DR ;
KINGSTON, AE ;
MCWHIRTER, RWP .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1962, 267 (1330) :297-&
[4]   A NOVEL COLLISIONAL RADIATIVE MODEL WITH A NUMERICAL BOTTOM AND AN ANALYTICAL TOP [J].
BENOY, DA ;
VANDERMULLEN, JAM ;
VANDERSIJDE, B ;
SCHRAM, DC .
JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1991, 46 (03) :195-210
[5]   MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196
[6]   HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].
BOGAERTS, A ;
GIJBELS, R ;
GOEDHEER, WJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241
[7]   THE ROLE OF FAST ARGON IONS AND ATOMS IN THE IONIZATION OF ARGON IN A DIRECT-CURRENT GLOW-DISCHARGE - A MATHEMATICAL SIMULATION [J].
BOGAERTS, A ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6427-6431
[8]   DESCRIPTION OF THE THERMALIZATION PROCESS OF THE SPUTTERED ATOMS IN A GLOW-DISCHARGE USING A 3-DIMENSIONAL MONTE-CARLO METHOD [J].
BOGAERTS, A ;
VANSTRAATEN, M ;
GIJBELS, R .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (05) :1868-1874
[9]   Role of sputtered Cu atoms and ions in a direct current glow discharge: Combined fluid and Monte Carlo model [J].
Bogaerts, A ;
Gijbels, R .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (03) :1279-1286
[10]  
Bogaerts A, 1998, PLASMA PHYS REP+, V24, P573