Metal nanoparticle direct inkjet printing for low-temperature 3D micro metal structure fabrication

被引:155
作者
Ko, Seung Hwan [1 ]
Chung, Jaewon [2 ]
Hotz, Nico [3 ]
Nam, Koo Hyun [1 ]
Grigoropoulos, Costas P. [3 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mech Engn, Appl Nano Technol & Sci Lab, Taejon 305701, South Korea
[2] Korea Univ, Dept Mech Engn, Seoul 136716, South Korea
[3] Univ Calif Berkeley, Laser Thermal Lab, Berkeley, CA 94720 USA
基金
美国国家科学基金会; 新加坡国家研究基金会;
关键词
POLYMERS; SIZE; JET;
D O I
10.1088/0960-1317/20/12/125010
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanoparticles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet-printed to exploit the large melting temperature drop of the nanomaterial and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink were carried out. Furthermore, diverse 3D metal microstructures, including micro metal pillar arrays, helices, zigzag and micro bridges were demonstrated and electrical characterization was performed. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.
引用
收藏
页数:7
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