High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)

被引：11

作者：

Hwang, KH ^{[1
]}

Koo, MK ^{[1
]}

Kim, SC ^{[1
]}

机构：

[1] Daewoo Elect Co Ltd, AMA Res Ctr, Kumchun Gu, Seoul 153023, South Korea

来源：

MICROELECTRONIC STRUCTURES AND MEMS FOR OPTICAL PROCESSING IV | 1998年 / 3513卷

关键词：

Thin-Film Actuated Mirror Array; spatial light modulator; microelectromechanical systems; MEMS; piezoelectric actuator; projection displays;

D O I：

10.1117/12.324276

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Thin-Film Actuated Mirror Array (TFAMA) is a new reflective type spatial light modulator (SLM) developed by using the microelectromechanical system (MEMS) technology. The micromachined thin-film piezoelectric actuators are used to control the tilting angle of micromirrors. This paper describes the principle, design, fabrication and the performance of the TFAMA module for high-brightness projection displays. Maximizing the optical performance in terms of the fill factor and the mirror flatness is the main issue of this paper. A hidden actuator design with the two-spacer process provides the highest optical efficiency among the reflection light modulators at the present time. A working projector prototype of 5,000 ANSI lumen is realized with three TFAMA modules with a 1 kW Xenon lamp.

引用

页码：171 / 180

页数：10