Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

被引：17

作者：

Itoh, A ^{[1
]}

Makabe, T ^{[1
]}

Shimura, N ^{[1
]}

Tougo, S ^{[1
]}

机构：

[1] KEIO UNIV,FAC SCI & TECHNOL,DEPT ELECT ENGN,YOKOHAMA,KANAGAWA 223,JAPAN

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1996年 / 24卷 / 01期

关键词：

Computerized tomography - Deposition - Electric currents - Electric discharges - Electrodes - Industrial robots - Light absorption - Light emission - Magnetron sputtering - Magnetrons - Permanent magnets - Visualization;

D O I：

10.1109/27.491736

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot, The robotic system is applied to the investigation of a de magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film.

引用

页码：109 / 110

页数：2