Fabrication of thin, luminescent, single-crystal diamond membranes

被引：52

作者：

Magyar, Andrew P. ^{[1
]}

Lee, Jonathan C. ^{[1
]}

Limarga, Andi M. ^{[1
]}

Aharonovich, Igor ^{[1
]}

Rol, Fabian ^{[1
]}

Clarke, David R. ^{[1
]}

Huang, Mengbing ^{[2
]}

Hu, Evelyn L. ^{[1
]}

机构：

[1] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA

[2] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 08期

基金：

美国国家科学基金会;

关键词：

ION-IMPLANTATION; CAVITY;

D O I：

10.1063/1.3628463

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through ion implantation often suffer from residual ion damage, which severely limits their usefulness for photonic structures. The current work demonstrates that strategic etch removal of the most highly defective material yields thin, single-crystal diamond membranes with strong photoluminescence and a Raman signature approaching that of single-crystal bulk diamond. These optically active membranes can form the starting point for fabrication of high-quality optical resonators. (C) 2011 American Institute of Physics. [doi:10.1063/1.3628463]

引用

页数：3

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