Holographic nanopatterning of the organic semiconductor poly(p-phenylene vinylene)

被引:26
作者
Gigli, G [1 ]
Rinaldi, R
Turco, C
Visconti, P
Cingolani, R
Cacialli, F
机构
[1] Univ Lecce, Dipartimento Sci Mat, Unita INFM, I-73100 Lecce, Italy
[2] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England
关键词
D O I
10.1063/1.122938
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a flexible method for the patterning of organic semiconductors in the submicrometer range, which we have successfully applied to thin films of poly(p-phenylene vinylene) (PPV) prepared on a variety of substrates, such as quartz, indium-tin oxide coated glass, or inorganic dielectric mirrors. The method is based on holographic lithography performed by a corner cube interferometer of our own design and construction, followed by Ar-ion etching. (C) 1998 American Institute of Physics. [S0003-6951(98)05352-2].
引用
收藏
页码:3926 / 3928
页数:3
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