Effects of Nb doping on properties of barium titanate thin films

被引:5
作者
Chu, JP [1 ]
Chang, CW
Mahalingam, T
Lin, CC
Wang, SF
机构
[1] Natl Taiwan Ocean Univ, Inst Mat Engn, Chilung 202, Taiwan
[2] Natl Taipei Univ Technol, Dept Mat & Mineral Resources Engn, Taipei 106, Taiwan
[3] Alagappa Univ, Dept Phys, Karaikkudi 630003, Tamil Nadu, India
关键词
D O I
10.1023/A:1025410219112
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nb doped barium titanate films were synthesized by r.f magnetron sputtering. As-deposited films were amorphous and started to crystallize around 500°C. The two-stage crystallization observed in DSC studies was explained on the basis of diffusion controlled nucleation and growth of crystallites. Doping of Nb in BT thin films was found to result in lattice expansion and grain refinement. The dielectric constant was found to increase with Nb addition. The lower value of dielectric constant was probably attributed to small grain sizes of Nb doped BT thin films.
引用
收藏
页码:1269 / 1273
页数:5
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